Definitions for DRIE
drie

WikipediaRate this definition:0.0 / 0 votes

1. DRIE

   Deep reactive-ion etching (DRIE) is a highly anisotropic etch process used to create deep penetration, steep-sided holes and trenches in wafers/substrates, typically with high aspect ratios. It was developed for microelectromechanical systems (MEMS), which require these features, but is also used to excavate trenches for high-density capacitors for DRAM and more recently for creating through silicon vias (TSVs) in advanced 3D wafer level packaging technology. In DRIE, the substrate is placed inside a reactor, and several gases are introduced. A plasma is struck in the gas mixture which breaks the gas molecules into ions. The ions accelerated towards, and react with the surface of the material being etched, forming another gaseous element. This is known as the chemical part of the reactive ion etching. There is also a physical part, if ions have enough energy, they can knock atoms out of the material to be etched without chemical reaction. DRIE is a special subclass of RIE. There are two main technologies for high-rate DRIE: cryogenic and Bosch, although the Bosch process is the only recognised production technique. Both Bosch and cryo processes can fabricate 90° (truly vertical) walls, but often the walls are slightly tapered, e.g. 88° ("reentrant") or 92° ("retrograde"). Another mechanism is sidewall passivation: SiOxFy functional groups (which originate from sulphur hexafluoride and oxygen etch gases) condense on the sidewalls, and protect them from lateral etching. As a combination of these processes deep vertical structures can be made.

Webster DictionaryRate this definition:0.0 / 0 votes

1. Drieverb

   to endure

2. Etymology: [See Dree.]

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1. DRIE

   What does DRIE stand for? -- Explore the various meanings for the DRIE acronym on the Abbreviations.com website.

How to pronounce DRIE?

1. Alex

   US English

   David

   US English

   Mark

   US English

   Daniel

   British

   Libby

   British

   Mia

   British

   Karen

   Australian

   Hayley

   Australian

   Natasha

   Australian

   Veena

   Indian

   Priya

   Indian

   Neerja

   Indian

   Zira

   US English

   Oliver

   British

   Wendy

   British

   Fred

   US English

   Tessa

   South African

How to say DRIE in sign language?

Numerology

1. Chaldean Numerology

   The numerical value of DRIE in Chaldean Numerology is: 3

2. Pythagorean Numerology

   The numerical value of DRIE in Pythagorean Numerology is: 9

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References

1. ^ Wikipedia
   https://en.wikipedia.org/wiki/Drie
2. ^ Webster Dictionary
   https://www.merriam-webster.com/dictionary/DRIE